An experimental study of the fabrication of polycarbonate optical waveguides

被引:0
|
作者
Chen, Jian-guo [1 ]
Zhang, Xiao-yang [1 ]
Zhang, Tong [1 ]
Zhu, Jin-song [2 ]
Wu, Peng-qin [1 ]
Zhou, Jing-lun [2 ]
Fan, Jiang-feng [2 ]
Yan, Hao-feng [1 ]
机构
[1] Southeast Univ, Sch Elect Sci & Engn, Nanjing 210096, Jiangsu, Peoples R China
[2] Natl Ctr NanoSci & Technol NCNST, Beijing 100080, Peoples R China
关键词
Optical waveguide; polycarbonate; propagation loss; photolithography; RIE; end-fire coupling technique; integrated optics;
D O I
10.1117/12.804769
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel polycarbonate (PC) was introduced to apply in the optical waveguide devices. PC has following distinct merits than common polycarbonate: good processability, high thermal stability up to 293 degrees C and high optical transparency. Optical properties of absorption behavior and propagation loss were investigated in slab waveguides, and low propagation losses of 0.335 dB/cm (@1550nm) and 0.197 dB/cm @632.8nm) have been achieved by using prism-coupler. Additionally, straight optical waveguide and MMI coupler of ring resonator were fabricated using ultraviolet (UV) cured resin Norland optical adhesive 61 (NOA61) as under or upper cladding layer and polycarbonate as waveguide core-layer material through conventional methods such as spin coating, photolithography and reactive ion etching (RIE). The process was studied in detail and the experimental results were given.
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页数:7
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