Full-field stress measurement based on phase-shifting ptychographic iterative engine

被引：0
|
作者：
Cheng, Bei [1 ,2 ,3 ]
Zhang, Xuejie [1 ]
Liu, Cheng [1 ]
Zhu, Jianqiang [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
[2] Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
来源：
TENTH INTERNATIONAL CONFERENCE ON INFORMATION OPTICS AND PHOTONICS | 2018年 / 10964卷
基金：
上海市自然科学基金;
关键词：
Ptychography; Birefringence; Stress Measurement; Isopachics;
D O I：
10.1117/12.2506333
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Stress measurement is significant to evaluate and predict optical behaviour of the birefringence components. The separation of two principal stress components is a difficult problem due to the coupling between them. A new PIE-based stress measurement method is proposed. Combining with the four-step phase-shifting measuring method, the complex amplitude transmittance functions of the sample in different phase-shifting states are reconstructed. Then the quantitative stress birefringence information are extracted respectively from the amplitude information and phase information. This method can achieve the complete stress information measurement and is especially suitable for the large-size samples.
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收藏
页数：6
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