Gas effect on the emission and detection of the backscattered electrons in a VP-SEM at low energy

被引：1

作者：

Hafsi, Z. ^{[1
]}

Mansour, O. ^{[1
]}

Kadoun, A. ^{[1
]}

Khouchaf, L. ^{[2
]}

Mathieu, C. ^{[3
]}

机构：

[1] Djilali Liabes Univ, Lab L2MSM, Phys Dept, Fac Exact Sci, BP 89, Sidi Bel Abbes 22000, Algeria

[2] Univ Lille, IMT Lille Douai, Cite Sci Rue Guglielmo Marconi BP 20145, F-59653 Villeneuve Dascq, France

[3] Univ Artois, Univ Lille Nord France, Fac Jean Perrin, SP 18, F-62307 Lens, France

来源：

ULTRAMICROSCOPY | 2018年 / 184卷

关键词：

VP-SEM; Backscattered electrons; Skirt; Diffused fraction; X-RAY-MICROANALYSIS; SCATTERING CROSS-SECTION; VARIABLE-PRESSURE; SCINTILLATOR-PHOTOMULTIPLIER; BEAM SCATTERING; IMAGE QUALITY; HELIUM GAS; MICROSCOPE; RESOLUTION; COEFFICIENT;

D O I：

10.1016/j.ultramic.2017.08.002

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The effect of the electron beam skirting on the emission and detection of the backscattered electrons (BSE) in a low vacuum scanning electron microscope is investigated at low energy regime. Monte Carlo computed dependencies of the BSE distribution on the water vapor and air pressure shown a significant increase of the extent of the BSE exit zone. The pressure variation has however a little effect when helium gas is used. A new approach based on the comparison between the sizes of the skirt and the BSE exit zone on the specimen surface provides a useful tool to determine the operating pressure range that ensures minimal degradation of the lateral resolution in BSE imaging mode. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：17 / 23

页数：7

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