AFM-based nanofabrication with assistance of femtosecond pulse laser radiation

We describe a novel method of scanning probe nanofabrication using an AFM(atomic) force microscopy) tip with assistance of femtosecond laser pulses to enhance fabrication capability. Illuminating the AFM tip with ultra short light pulses induces a strong electric field between the tip and the metal surface to be fabricate. The optically generated electric field permits removing metal atoms from the surface by means of field evaporation with an improved level of controllability on the atom transfer direction and rate in comparison to customary manipulation based on intrinsic chemical interactions between atoms. Simulation performed in this investigation reveals that the optical field evaporation is triggered even in air when the induced electric field reaches a few volts per nanometer. Experimental results demonstrate that fine structures with critical dimensions less than similar to 10 nm can be successfully made by precise controlling femtosecond laser pulses.