Metrological scanning probe microscope based on a quartz tuning fork detector

被引：3

作者：

Babic, Bakir ^{[1
]}

Freund, Christopher H. ^{[1
]}

Herrmann, Jan ^{[1
]}

Lawn, Malcolm A. ^{[1
]}

Miles, John ^{[1
]}

机构：

[1] Natl Measurement Inst Australia, Lindfield, NSW 2070, Australia

来源：

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2012年 / 11卷 / 01期

关键词：

metrological scanning probe microscope; atomic force microscopy; noncontact mode; quartz tuning fork; frequency modulation; CALIBRATION;

D O I：

10.1117/1.JMM.11.1.011003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We give an overview of the design of a metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the International System of Units (SI) meter at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100 mu m x 100 mu m x 25 mu m with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.JMM.11.1.011003]

引用

页数：6

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