A ROBUST, FAST ELECTROTHERMAL MICROMIRROR WITH SYMMETRIC BIMORPH ACTUATORS MADE OF COPPER/TUNGSTEN

被引：0

作者：

Zhang, Xiaoyang ^{[1
]}

Li, Boxiao ^{[1
]}

Li, Xingde ^{[2
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL USA

[2] Johns Hopkins Univ, Dept Biomed Engn, Baltimore, MD USA

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

MEMS mirror; electrothermal actuation; symmetric bimorph; inverse-series-connected; MIRROR; ARRAYS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a fast, robust electrothermal bimorph micromirror with a symmetric inverse-series-connected bimorph actuator. The actuator is made up of symmetric Cu-W bimorphs with high sensitivity and fast thermal response. A unique backside DRIE release process is developed to keep the mirror surface intact during release. The micromirror is able to perform both piston and tip-tilt motion. A maximum piston displacement of 169 mu m is achieved with lateral shift less than 1.5 mu m at the driving voltage of only 2.3 V. The maximum optical angle achieved is +/- 13 degrees at 2.3 V. This mirror gives fast thermal response of less than 7.5 ms. The resonances of the piston and tip-tilt modes are 1.58 kHz and 2.74 kHz, respectively.

引用

页码：912 / 915

页数：4

共 2 条

[1] An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten
Wang, Dingkang
Zhang, Xiaoyang
Zhou, Liang
Liang, Mengyue
Zhang, Daihua
Xie, Huikai
2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2017, : 87 - 88
[2] A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion
Todd, ST
Jain, A
Qu, H
Xie, H
IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications, 2005, : 27 - 28

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