Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

被引：14
|
作者：
Shi, Huichao [1 ,2 ,3 ]
Fan, Shangchun [1 ,2 ]
Zhang, Yuwen [3 ]
Sun, Jinhao [1 ,2 ]
机构：
[1] Beihang Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100191, Peoples R China
[2] Beihang Univ, Sci & Technol Inertial Lab, Beijing 100191, Peoples R China
[3] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2015年 / 21卷 / 04期
基金：
美国国家科学基金会; 中国国家自然科学基金;
关键词：
PERFORMANCE;
D O I：
10.1007/s00542-014-2109-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A vibration model of double-clamped resonant beam that is driven by electro-thermal excitation for a MEMS resonant sensor is established. The sample-based stochastic model is established to investigate the influence of different uncertain structure size and excitation parameters on sensor performance. Effects of uncertainty distributions of structure size and excitation voltage due to fabricating or control errors on sensor performance, including nature frequency F (rn) , quality factor per unit amplitude Q (amp) , and the detecting sensitivity S (p) , are studied. The results can be used as references for design and optimization of the structure size and excitation parameters of electro-thermal excited MEMS resonant sensor.
引用
收藏
页码：757 / 771
页数：15
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