Study of boron nitride films synthesized by ion beam and vapor deposition

被引：0
|
作者：
Nishiyama, S [1 ]
Ebe, A [1 ]
Kuratani, N [1 ]
Iwamoto, Y [1 ]
Ogata, K [1 ]
机构：
[1] NISSAN ELECT CO LTD,R&D DIV,UKYO KU,KYOTO 6150,JAPAN
来源：
ION BEAM MODIFICATION OF MATERIALS | 1996年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：740 / 743
页数：4
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