Proceedings of the First International SiGe Technology and Device Meeting (ISTDM 2003) - From materials and process technology to device and circuit technology - 15-17 January, 2003 - Nagoya University Symposion, Nagoya, Japan - Preface

被引：0

作者：

Murota, J ^{[1
]}

Tillack, B ^{[1
]}

Caymax, M ^{[1
]}

Sturm, J ^{[1
]}

Yasuda, Y ^{[1
]}

Zaima, S ^{[1
]}

机构：

[1] Tohoku Univ, Res Inst Elect Commun, Sendai, Miyagi 9808577, Japan

来源：

APPLIED SURFACE SCIENCE | 2004年 / 224卷 / 1-4期

关键词：

D O I：

10.1016/j.apsusc.2003.08.085

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1 / 2

页数：2

共 6 条

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