Study on differential algebraic method for electron optical properties of wide electron beams in immersion electrostatic-magnetic lenses

被引：1
|
作者：
Tang, T. T. [1 ]
Zhao, J. Y. [1 ]
Zhang, D. B. [1 ]
Kang, Y. F. [1 ]
机构：
[1] Xi An Jiao Tong Univ, Dept Elect Sci & Technol, Sch Elect & Informat Engn, Xian 710049, Peoples R China
来源：
OPTIK | 2010年 / 121卷 / 19期
关键词：
Differential algebra; Combined immersion magneto-electrostatic system; Curvilinear-axis theory;
D O I：
10.1016/j.ijleo.2009.05.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Differential algebraic method for calculation of electron optical properties is extended to wide electron beams in combined immersion electrostatic-magnetic lenses, based on Taylor series expansion of the differential algebraic data structure of wide electron beam focusing systems. Higher order aberrations referred to off-axis central trajectories are calculated and this makes the evaluation of wide electron beam focusing properties much simplified with high-enough precision. A program was written, and a specific combined immersion electrostatic-magnetic lens is calculated as an example. Computed results show that the second aperture aberrations referred to off-axis central trajectories of the system of the primary one, whereas the third- and over third-order ones only play a secondary role. (C) 2009 Elsevier GmbH. All rights reserved.
引用
收藏
页码：1809 / 1813
页数：5
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