Formation of various types of nanostructures on germanium surface by nanosecond laser pulses

被引：7

作者：

Mikolutskiy, S. I. ^{[1
]}

Khasaya, R. R. ^{[1
]}

Khomich, Yu V. ^{[1
]}

Yamshchikov, V. A. ^{[1
]}

机构：

[1] RAS, Inst Electrophys & Elect Power, Dvorzovaya Naberezhnaya 18, St Petersburg 191186, Russia

来源：

APPLIED NANOTECHNOLOGY AND NANOSCIENCE INTERNATIONAL CONFERENCE 2017 (ANNIC 2017) | 2018年 / 987卷

关键词：

GROWTH;

D O I：

10.1088/1742-6596/987/1/012007

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The paper describes the formation of micro- and nanostructures in different parts of irradiation zone on germanium surface by multiple action of nanosecond pulses of ArF-laser. It proposes a simple method using only one laser beam without any optional devices and masks for surface treatment. Hexa-and pentagonal cells with submicron dimensions along the surface were observed in peripheral zone of irradiation spot by atomic-force microscopy. Nanostructures in the form of bulbs with rounded peaks with lateral sizes of 40-120 nm were obtained in peripheral low-intensity region of the laser spot. Considering experimental data on material processing by nanosecond laser pulses, a classification of five main types of surface reliefs formed by nanosecond laser pulses with energy density near or slightly above ablation threshold was proposed.

引用

页数：5

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