A novel XPS system for integration into advanced semiconductor equipment for in-line process control

被引：0
|
作者：
Kasko, I [1 ]
Oechsner, R [1 ]
Schneider, C [1 ]
Pfitzner, L [1 ]
Ryssel, H [1 ]
Trubitsyn, AA [1 ]
Kratenko, VI [1 ]
机构：
[1] Fraunhofer Inst Integrierte Schaltungen, D-91058 Erlangen, Germany
来源：
ECASIA 97: 7TH EUROPEAN CONFERENCE ON APPLICATIONS OF SURFACE AND INTERFACE ANALYSIS | 1997年
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：1089 / 1092
页数：4
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