Design of 600 GHz 3-bit Delay-line Phase Shifter Using RF NEMS Series Switches

被引：0

作者：

Yang, Yi ^{[1
]}

Chan, King Yuk ^{[1
]}

Ramer, Rodica ^{[1
]}

机构：

[1] Univ New S Wales, Sch Elect Engn & Telecommun, Sydney, NSW 2052, Australia

来源：

2011 IEEE INTERNATIONAL SYMPOSIUM ON ANTENNAS AND PROPAGATION (APSURSI) | 2011年

关键词：

microelectromechanical systems (MEMS); RF MEMS; NEMS; RF NEMS; phase shifter; switch; delay line;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 mu m x 37.8 mu m. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.

引用

页码：3276 / 3279

页数：4

共 36 条

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