Characteristics of pentacene-based thin-film transistors

被引:29
|
作者
Park, JH [1 ]
Kang, CH [1 ]
Kim, YJ [1 ]
Lee, YS [1 ]
Choi, JS [1 ]
机构
[1] Hongik Univ, Dept Elect Informat & Control Engn, Seoul 121791, South Korea
关键词
pentacene; organic TFTs; capacitance-voltage; MIS;
D O I
10.1016/j.msec.2003.09.064
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pentacene was used as an active layer of organic thin-film transistors (TFTs) by depositing with the vacuum thermal evaporation. It is revealed that the deposition rate of pentacene may have critical effects on the electrical properties of pentacene-based TFTs. For the device fabrication, pentacene layers were deposited at a rate of 0.5, 1.0 and 2.5 Angstrom/s. Upon the investigations, TFT with the pentacene layer deposited at a rate of 2.5 Angstrom/s showed the most superior properties. The field-effect mobility of 0.16 cm(2)/V s, and the on/off current ratio of 10(5) were obtained at a drain voltage of -30 V To study the correlation between the deposition rate and the device performance, the capacitance properties were also measured in the metal/insulator/organic semiconductor (MIS) structure device by employing the capacitance-voltage (C-V) measurements. The lowest capacitance value was observed in the device with the pentacene layer deposited at a rate of 2.5 Angstrom/s. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:27 / 29
页数:3
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