Design of short Silicon Kinoform Lens for hard X ray focusing

被引：0
|
作者：
Meng Limin [1 ]
Du Liangliang [1 ]
An Ran [1 ]
Liu Dongbing [1 ]
Ye Yan [1 ]
机构：
[1] CAEP, Inst Fluid Phys, Mianyang, Sichuan, Peoples R China
来源：
SECOND TARGET RECOGNITION AND ARTIFICIAL INTELLIGENCE SUMMIT FORUM | 2020年 / 11427卷
基金：
中国国家自然科学基金;
关键词：
Kinoform; Hard X-ray; Focusing; XFEL;
D O I：
10.1117/12.2552449
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
The focusing of hard X-ray is limited by the ability to design and to fabricate high-quality optics. The gains in resolution are often made at a sacrifice of focusing efficiency. The short Kinoform lenses offer a compromise position of high resolution and efficiency. Here we describe the design and the properties simulation of a series of short Kinoform lenses. After optimizing of the main characteristics, the focus spots size of the designed short Kinoform lens were proved to sub 500nm at photon energy of 30 keV.
引用
收藏
页数：6
相关论文
共 50 条
  • [1] Focusing performance of hard X-ray single Kinoform lens
    Chen Zhi
    Xu Liang
    Chen Rong-Chang
    Du Guo-Hao
    Deng Biao
    Xie Hong-Lan
    Xiao Ti-Qiao
    ACTA PHYSICA SINICA, 2015, 64 (16)
  • [2] Optimized short kinoform lenses for hard X-ray nano-focusing
    Liao, Keliang
    Hong, Youli
    Sheng, Weifan
    OPTICS COMMUNICATIONS, 2015, 339 : 53 - 60
  • [3] Germanium and silicon kinoform focusing lenses for hard x-rays
    Alianelli, L.
    Sawhney, K. J. S.
    Tiwari, M. K.
    Dolbnya, I. P.
    Stevens, R.
    Jenkins, D. W. K.
    Loader, I. M.
    Wilson, M. C.
    Malik, A.
    9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2009, 186
  • [4] Trapezoid-kinoform zone plate lens - a solution for efficient focusing in hard X-ray optics
    Tong, Xujie
    Chen, Yifang
    Xu, Zijian
    Li, Yijie
    Xing, Zhenjiang
    Mu, Chengyang
    Zhao, Jun
    Zhen, Xiangjun
    Mao, Chengwen
    Tai, Renzhong
    JOURNAL OF SYNCHROTRON RADIATION, 2022, 29 : 386 - 392
  • [5] Ultimate limitations in the performance of kinoform lenses for hard x-ray focusing
    Gorelick, S.
    De Jonge, M. D.
    Kewish, C. M.
    De Marco, A.
    OPTICA, 2019, 6 (06): : 790 - 793
  • [6] Focusing hard X-ray with a single lens
    Zhang, YP
    Katoh, T
    Kagoshima, Y
    Matui, J
    Tsusaka, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2001, 40 (1AB): : L75 - L77
  • [7] Fabrication of silicon kinoform lenses for hard x-ray focusing by electron beam lithography and deep reactive ion etching
    Stein, Aaron
    Evans-Lutterodt, Kenneth
    Bozovic, Natasha
    Taylor, Ashley
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01): : 122 - 127
  • [8] Sub-500 nm hard x ray focusing by compound long kinoform lenses
    Liao, Keliang
    Liu, Jing
    Liang, Hao
    Wu, Xuehui
    Zhang, Kai
    Yuan, Qingxi
    Yi, Futing
    Sheng, Weifan
    APPLIED OPTICS, 2016, 55 (01) : 38 - 41
  • [9] The compound refractive lens for hard X-ray focusing
    Choi, J.
    Jung, J.
    Park, S.
    Kwon, T.
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA, 2007, 11 (02) : 76 - 81
  • [10] Sputtered-sliced fabrication of kinoform zone plate for hard X-ray focusing
    Yasumoto, M
    Tamura, S
    Kamijo, N
    Suzuki, Y
    Awaji, M
    Takeuchi, A
    Takano, H
    JOURNAL DE PHYSIQUE IV, 2003, 104 : 189 - 192
12345