Polymer Nanostructured Components Machined Directly by the Atomic Force Microscopy Scratching Method

被引：13

作者：

Yan, Yong Da ^{[1
,2
]}

Gao, Da Wei ^{[1
,2
]}

Hu, Zhen Jiang ^{[2
]}

Sen Zhao, Xue ^{[2
]}

Yan, Jiu Chun ^{[2
]}

机构：

[1] Harbin Inst Technol, Inst Robot, State Key Lab Robot & Syst, Harbin 150080, Peoples R China

[2] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Heilongjiang, Peoples R China

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2012年 / 13卷 / 02期

关键词：

Atomic Force Microscopy (AFM); Taguchi method; Nanomechanical scratching; Nanostructures; SCANNING PROBE LITHOGRAPHY; NANOMETER-SCALE; SURFACE; TIP; NANOLITHOGRAPHY; NANOSCALE; AFM;

D O I：

10.1007/s12541-012-0033-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study aims to machine complex three dimensional nano-structures on polymer surfaces directly using the Atomic Force Microscopy (AFM)-based nano-mechanical processing method. Processing parameters including the normal load, the feed rate, the machining speed and the scanning direction are optimized by the Taguchi method. Their effects on the machined depth and the surface roughness of the machined structures are analyzed. Meanwhile, the AFM PZT tube is controlled to achieve the tip's three-dimensional motions in space. Using the optimized processing parameters. three-dimensional nanostructures on the surface of PMMA are directly fabricated. It is a novel low-cost manufacturing method for machining complex three-dimensional nano-structures or nano parts on polymer sum faces directly.

引用

页码：269 / 273

页数：5

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