HIGH-PERFORMANCE PULL-IN TIME ACCELEROMETER

被引：0

作者：

Dias, R. A. ^{[1
,2
]}

Alves, F. S. ^{[2
]}

Costa, M. ^{[1
]}

Fonseca, H. ^{[1
]}

Cabral, J. ^{[3
]}

Gaspar, J. ^{[1
]}

Rocha, L. A. ^{[1
,2
]}

机构：

[1] INL Int Iberian Nanotechnol Lab, Braga, Portugal

[2] Univ Minho, CMEMS, Guimaraes, Portugal

[3] Univ Minho, Ctr ALGORITMI, Guimaraes, Portugal

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Electrostatic pull-in; pull-in time; closed-loop accelerometer;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A closed-loop accelerometer based on electrostatic pull-in time is presented here. The main goal is to achieve high-performance, namely in respect to noise and sensitivity, with a very simple readout mechanism. An integrated system was implemented comprising actuation and readout circuitry, FPGA and MEMS sensor. It presents a good performance in comparison to the state-of-the-art. Experimental measurements have shown a sensitivity of 61.3 V-2/g, dynamic range of 110 dB and a noise level set below 3 mu g/root Hz, by the mechanical-thermal noise only. The measured bias stability is better than +/- 250 mu g over 48h with temperature control of +/- 1 degrees C.

引用

页码：1109 / 1112

页数：4

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