Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator

被引：84
|
作者：
Ahmed, Abu Naim R. [1 ]
Shi, Shouyuan [1 ]
Zablocki, Mathew [1 ]
Yao, Peng [2 ]
Prather, Dennis W. [1 ]
机构：
[1] Univ Delaware, Sch Elect & Comp Engn, Newark, DE 19716 USA
[2] Phase Sensit Innovat, Newark, DE 19711 USA
来源：
OPTICS LETTERS | 2019年 / 44卷 / 03期
关键词：
RESONATORS; MODULATION;
D O I：
10.1364/OL.44.000618
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This Letter presents, to the best of our knowledge, the first hybrid Si3N4-LiNbO3-based tunable microring resonator where the waveguide is formed by loading a Si3N4 strip on an electro-optic (EO) material of X-cut thin-film LiNbO3. The developed hybrid Si3N4-LiNbO3 microring exhibits a high intrinsic quality factor of 1.85 x 10(5), with a ring propagation loss of 0.32 dB/cm, resulting in a spectral linewidth of 13 pm, and a resonance extinction ratio of similar to 27 dB within the optical C-band for the transverse electric mode. Using the EO effect of LiNbO3, a 1.78 pm/V resonance tunability near 1550 nm wavelength is demonstrated. (C) 2019 Optical Society of America
引用
收藏
页码：618 / 621
页数：4
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