New experimental approach for measuring electrical contact resistance with an accurate mechanical actuation, evaluation of the performances of gold micro-switches

被引：0

作者：

Seguineau, Cedric ^{[1
,2
]}

Broue, Adrien ^{[1
]}

Pennec, Fabienne ^{[3
]}

Dhennin, Jeremie ^{[1
]}

Desmarres, Jean-Michel ^{[4
]}

Pothier, Arnaud ^{[5
]}

Lafontan, Xavier ^{[1
]}

Ignat, Michel ^{[2
]}

机构：

[1] NOVA MEMS, 10 Ave Europe, F-31520 Ramonville St Agne, France

[2] Univ Joseph Fourier, SIMaP, INPG, UMR 5266, F-38402 St Martin Dheres, France

[3] LAAS CNRS, F-31401 Toulouse, France

[4] CNES, DCT AQ LE, F-31401 Toulouse, France

[5] XLIM LAb, Minacom Dpt, F-87060 Limoges, France

来源：

MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES | 2008年 / 1052卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A specific experimental setup combining nanoindentation and electrical inputs has been developed in order to determine the reliability and the performances of Micro-ElectroMechanical Systems (MEMS) like micro-switches. The evolution of the electrical resistance with respect to a mechanical solicitation applied on the contact, is henceforth available. The description of the setup goes with a brief overview of the tests performed on a gold ohmic switch. A discussion is developed considering the mechanisms involved in the contact response. A confrontation among the experimental results, the analytical modeling and also finite-element analysis is presented.

引用

页码：235 / +

页数：2