Molecular dynamics analysis micro-mechanism of ductile machining single crystal silicon by means of nanometric cutting technology

被引:8
|
作者
Han, X. S. [1 ]
Hu, Y. -Z. [2 ]
Yu, S. [1 ]
机构
[1] Tianjin Univ, Sch Mech Engn, Lab Robot & Automobile Technol, Tianjin 300072, Peoples R China
[2] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China
来源
关键词
D O I
10.1051/epjap:2008087
中图分类号
O59 [应用物理学];
学科分类号
摘要
It is difficult for brittle materials to acquire high machined surface quality as they have low fracture strength. But in the case of nanometric cutting technology, nanometer level machined surface is often acquired by means of ductile material remove mode. In order to investigate physical essence of ductile machining process, this paper carries out molecular dynamics (MD) analysis of nanometric cutting single crystal silicon. The result shows that huge hydrostatic pressure induced in the local area which lead to the silicon atom transform from classical diamond structure (alpha silicon) to metal structure (beta silicon). At the same time, the stress concentration is avoided by uniformly distributed pressure in the cutting area. These two important factors together result in the ductile machining of silicon and then acquire super-smooth surface.
引用
收藏
页码:255 / 262
页数:8
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