Synergism of the action of NH3 and V2O5 on the thermal oxidation of GaAs in humid oxygen

被引：1
|
作者：
Mittova, IY [1 ]
Lavrushina, SS [1 ]
Muratov, AA [1 ]
机构：
[1] Voronezh State Univ, Voronezh 394693, Russia
来源：
DOKLADY CHEMISTRY | 2003年 / 391卷 / 4-6期
关键词：
Oxidation; Oxygen; GaAs; V2O5; Thermal Oxidation;
D O I：
10.1023/A:1025388720014
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：219 / 221
页数：3
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