Cooperative Carbon Nanotube Nanomanipulation For Field Effect Transistor

被引：0

作者：

Chen, Donglei ^{[1
]}

Yang, Zhan ^{[1
]}

Chen, Tao ^{[1
]}

Sun, Lining ^{[1
]}

Fukuda, Toshio ^{[1
]}

机构：

[1] Soochow Univ, Prov Jiangsu Key Lab Adv Robot & Collaborat, Innovat Ctr Suzhou Nano Sci & Technol, Suzhou, Peoples R China

来源：

2019 14TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019) | 2019年

关键词：

cooperative nanomanipulation; carbon nanotube; robotics; SYSTEM;

D O I：

10.1109/nems.2019.8915672

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, based on the operating environment of scanning electron microscope (SEM), the cooperative control of carbon nanotubes by controlling multi-operator hand was realized by controlling the robot operator with multiple degrees of freedom. Firstly, the carbon nanotube was picked up from the bulk by the nano manipulations. Then the nanotube was transferred on the surface of the metal electrode of the chip using the two nano manipulations and fixed on by electron beam induced deposition (EBID). In this robotics manipulation system, operation and assembly of carbon nanotube were successfully realized. The voltage-current property of the carbon nanotube was also evaluated in the SEM

引用

页码：377 / 380

页数：4

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