FINITE ELEMENT ANALYSIS FOR RELIABLE REPLICATION OF ALIGNMENT STRUCTURES IN MICRO HOT EMBOSSING

被引：0
|
作者：
Gomez, Juan A. [1 ]
Conner, Glenn [2 ]
Song, In-Hyouk [1 ,2 ]
Kim, Yoo-Jae [1 ,2 ]
You, Byoung Hee [1 ,2 ]
Chun, Du-Hwan [3 ]
机构：
[1] Texas State Univ, Mat Sci Engn & Commercializat Program, San Marcos, TX 78666 USA
[2] Texas State Univ, Dept Engn Technol, San Marcos, TX USA
[3] Yeungnam Univ, Dept Text Engn & Technol, Gyongsan, South Korea
来源：
PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 | 2014年
关键词：
LITHOGRAPHY; MICROFABRICATION; BEHAVIOR; POLYMERS; FLOW;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Numerical analysis to predict the flow behavior of polymers was conducted using commercial finite element software, DEFORM-2D. An alignment structure, a hemisphere-tipped post with an annular ring, was modeled to demonstrate the flow front of the polymer during molding. The cavity filling process was evaluated by measuring the heights of the molded posts and confirmed and validated by experimental data. Estimated and measured heights showed better replication accuracy with the increase of molding temperature and embossing force. Results exposed complete cavity filling at embossing forces of 600 and 900 N at a molding temperature of 137.5 degrees C. The FEM prediction tool can be used to select the adequate process parameters for a high fidelity replication of polymer microstructures.
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页数：7
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