MEMS-based air quality sensor

被引：0

作者：

Mescheder, U. ^{[1
]}

Bauersfeld, M. -L. ^{[2
]}

Kovacs, A. ^{[1
]}

Kritwattanakhron, J. ^{[1
]}

Mueller, B. ^{[1
]}

Peter, A. ^{[3
]}

Ament, Ch. ^{[4
]}

Rademacher, S. ^{[2
]}

Woellenstein, J. ^{[2
]}

机构：

[1] Hsch Furtwangen Univ, Inst Appl Res, Furtwangen, Germany

[2] Fraunhofer Inst Phys Measurement Techniques, Freiberg, Germany

[3] Dept Microsyst Engn, Lab Syst Theor, Freiberg, Germany

[4] TU Ilmeanu, Inst Automat Syst Engn, Ilmenau, Germany

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

air quality measurement; metal oxide gas sensor; porous silicon based humidity sensor; sensor modeling;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel sensor array based on MEMS-technology for quantitative measurement of the air quality and a novel model based measurement strategy. The sensor array consists of SnO2 - gas sensors, a porous silicon based humidity sensor and a Pt-temperature sensor monolithically integrated on a single chip. It was fabricated using SOI-technology, Pt-metallization and bulk micromachining. Good characteristics of the sensor array in terms of thermal proper-ties, sensitivity, selectivity and time response have been achieved. The values of gas content and atmospheric humidity evaluated based on the developed sensor models are in a good consistence with the actual values.

引用

页数：2

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