6.4 GHZ ACOUSTIC SENSOR FOR IN-SITU MONITORING OF AFM TIP WEAR

被引：0

作者：

Cheng, Tiffany J. ^{[1
]}

Han, Jun Hyun

Ziwisky, Michael

Lee, Chung Hoon

Bhave, Sunil A. ^{[1
]}

机构：

[1] Cornell Univ, Ithaca, NY 14853 USA

来源：

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 mu m off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.

引用

页码：521 / 524

页数：4

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