Optical characterization of GaN films grown on (0001)sapphire substrate

被引:1
|
作者
Yang, K
Zhang, R
Zheng, YD
Qin, LH
Shen, B
Shi, HT
Huang, ZC
Chen, JC
机构
关键词
D O I
10.1557/PROC-423-747
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The optical properties of single crystal hexagonal GaN films grown on (0001) sapphire substrate by metalorganic chemical vapor deposition were investigated. The energy gap of hexagonal GaN was determined as 3.39 and 3.400 eV by optical transmission and photoreflectance, respectively. The refractive index of GaN as a function of photon energy was drawn from the transmission spectrum. Furthermore, Raman scattering spectra were employed to study the phonon modes of the GaN film. The properties of LO phonon-plasmon coupled modes were further studied, and the carrier concentration and damping constant were determined by line-shape fitting of the coupled modes.
引用
收藏
页码:747 / 752
页数:6
相关论文
共 50 条
  • [1] Influence of selective GaN islands on optical properties of GaN films grown on sapphire substrate
    Haffouz, S
    Hageman, PR
    Kirilyuk, V
    Macht, L
    Weyher, JL
    Larsen, PK
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 97 (01): : 9 - 12
  • [2] Comparisons of structural and optical properties of ZnO films grown on (0001) sapphire and GaN/(0001) sapphire template by atmospheric-pressure MOCVD
    Dai, JN
    Liu, HH
    Fang, WQ
    Wang, L
    Pu, Y
    Jiang, FY
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 127 (2-3): : 280 - 284
  • [3] Structure of GaN films grown by molecular beam epitaxy on (0001) sapphire
    Romano, LT
    Krusor, BS
    Singh, R
    Moustakas, TD
    JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (03) : 285 - 289
  • [4] Structure of GaN films grown by molecular beam epitaxy on (0001) sapphire
    L. T. Romano
    B. S. Krusor
    R. Singh
    T. D. Moustakas
    Journal of Electronic Materials, 1997, 26 : 285 - 289
  • [5] Structural analysis of GaN and GaN/InGaN/GaN DH structures on sapphire (0001) substrate grown by MOCVD
    Sato, H
    Naoi, Y
    Sakai, S
    III-V NITRIDES, 1997, 449 : 441 - 446
  • [6] Investigation of preparation and characterization of GaN films on sapphire (0001) substrates
    Yang, YG
    Ma, HL
    Xue, CS
    Zhuang, HZ
    Hao, XT
    Ma, J
    APPLIED SURFACE SCIENCE, 2002, 202 (3-4) : 295 - 300
  • [7] Polarity determination for GaN films grown on (0001) sapphire and high-pressure-grown GaN single crystals
    Rouviere, JL
    Weyher, JL
    Seelmann-Eggebert, M
    Porowski, S
    APPLIED PHYSICS LETTERS, 1998, 73 (05) : 668 - 670
  • [8] Characterizations of GaN films and AlGaN/GaN heterostructures on vicinal sapphire (0001) substrates grown by MOCVD
    Shen, X. Q.
    Shimizu, M.
    Okumura, H.
    Xu, F. J.
    Shen, B.
    Zhang, G. Y.
    JOURNAL OF CRYSTAL GROWTH, 2009, 311 (10) : 2853 - 2856
  • [9] Improved optical performance of GaN grown on pattered sapphire substrate
    Yao Guangrui
    Fan Guanghan
    Li Shuti
    Zhang Yong
    Zhou Tianmin
    JOURNAL OF SEMICONDUCTORS, 2009, 30 (01)
  • [10] Infrared characterization of GaN films grown on sapphire by MOCVD
    Kuroda, N
    Saiki, K
    Hasanudin
    Watanabe, J
    Cho, M
    PHYSICS OF SEMICONDUCTORS, PTS A AND B, 2005, 772 : 281 - 282