Integrated optic devices in silicon and silicon-on-insulator materials

被引：0
|
作者：
Schuppert, B [1 ]
Petermann, K [1 ]
机构：
[1] Tech Univ Berlin, Fachgebiet Hochfrequenztech, D-10587 Berlin, Germany
来源：
MATERIALS AND DEVICES FOR SILICON-BASED OPTOELECTRONICS | 1998年 / 486卷
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reviews various integrated optics techniques and devices in the silicon material system. Different approaches for waveguides, passive and active components in silicon and the performance of such devices will be discussed.
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页码：33 / 44
页数：12
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