Method for measuring profile of large aspheric optics at grinding stage based on NC machine

被引:0
|
作者
Zhang YiChun [1 ,2 ]
Bin Fan [2 ]
Zhou Jia Bin [2 ]
机构
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
关键词
Large aspherical mirrors; Coordinate Measurement Machine; Measurement of surface;
D O I
10.1117/12.866448
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
According to the measurement at grinding stage, we put forward a method based on numerical control machine tools(NC) to measure profile of large aspheric optic. First, we calibrate the straightness of the machine tool sliding guide which is a critical component of the test system and has a function of supporting and orienting, to improve the motion precision of that machine; and second, measure profile of large aspheric optic with the help of NC machine and Heidenhai(MT60); and third, process the test data to further enhance the precision of measurement.
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页数:6
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