A NOVEL RESONANT ACCELEROMETER BASED ON MODE LOCALIZATION OF WEAKLY COUPLED RESONATORS

被引：0

作者：

Zhang, H. M. ^{[1
]}

Yuan, W. Z. ^{[1
]}

Li, B. Y. ^{[1
]}

Hao, Y. C. ^{[1
]}

Kraft, M. ^{[2
]}

Chang, H. L. ^{[1
]}

机构：

[1] Northwestern Polytech Univ, MOE Key Lab Micro & Nano Syst Aerosp, Xian, Peoples R China

[2] Univ Liege, Montefiore Inst, Liege, Belgium

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Resonant accelerometer; mode localization; high sensitivity; weakly coupled resonators;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer. When acceleration acts on the two proof masses, there will be a differential electrostatic stiffness perturbation introduced on the WCRs, which leads to mode localization and mode shape change. Therefore, the acceleration can be sensed by measuring the amplitude ratio shift. The measured relative shift in amplitude ratio (similar to 312162 ppm/g) is 302 times higher than the shift in resonance frequency (similar to 1035 ppm/g).

引用

页码：1073 / 1076

页数：4

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