Preparation of nano-TiO2 thick film and its electrical properties

被引:0
|
作者
Wang, J [1 ]
Gao, L [1 ]
Song, Z [1 ]
Zhou, W [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
关键词
nano-TiO2; resistance; gas sensitivity; sensor; thick film;
D O I
暂无
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nano-TiO2 and micro-TiO2 thick films were prepared on alpha-Al2O3 substrates by silk net lithograph method, the measured film resistance of nano-TiO2 was higher than that of micro-TiO2 in experimental temperature range, nano-TiO2 film demonstrated more change as the O-2 partial pressure changed. XRD and SEM were also used to characterize the stucture of the prepared films.
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页码:866 / 870
页数:5
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