Zernike polynomials for evaluation of optical system in use

被引:1
|
作者
Shan, Baozhong [1 ]
Guo, Baoping
Niu, Hanben
Wang, Shuyan
机构
[1] Shenzhen Univ, Inst Optoelect, Shenzhen 518060, Guangdong, Peoples R China
关键词
Zernike polynomials; fitting; integrated analysis; finite element method; optical-structural system;
D O I
10.1117/12.783678
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Affected by working condition, performance of optical system will decline, especially for large system or system in bad and complex condition. Integrated analysis can predict its performance through multi-subject engineering analysis. Thermal\structural\optical(TSO) integrated analysis is typical([1]). The key problem in TSO process is data transmission among optical, mechanical and thermal programs. Each item of Zernike polynomials has corresponding meanings with Seidel aberrations and is widely used in project, optical design software and interference checks. It is convenient and mature to use Zernike polynomials as data transmission tool between optical and structural analysis program. In TSO process, the principle, fitting method and fitting process of Zernike polynomials are outlined. This method was successfully used in some optical system's design and fabricates process.
引用
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页数:7
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