Measurement of the electron energy distribution in moving striations at low gas pressures

被引:13
|
作者
Godyak, V. A. [1 ,2 ]
Alexandrovich, B. M. [3 ]
Kolobov, V. I. [4 ,5 ]
机构
[1] Univ Michigan, Elect Engn & Comp Sci Dept, Ann Arbor, MI 48109 USA
[2] RF Plasma Consulting, Brookline, MA 02446 USA
[3] Plasma Sensors, Brookline, MA 02446 USA
[4] Univ Alabama, Huntsville, AL 35899 USA
[5] CFD Res Corp, Huntsville, AL 35806 USA
关键词
DISCHARGE; SIMULATIONS;
D O I
10.1063/1.5088706
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The time-resolved Electron Energy Distribution Functions (EEDFs) have been measured at different phases of moving striations in a positive column of DC discharge in argon gas. A very low gas pressure of 10 mTorr, a high energy resolution (to resolve the low energy part of the EEDF), and the dynamic range up to 3-4 orders of magnitude (to resolve the EEDF tail) with a temporal resolution of 2.5 mu s distinguish our work from previous publications. The measured EEDFs reveal drastic changes in time of their low energy parts with the formation of a low energy peak. The observed EEDF dynamics is explained in the framework of nonlocal electron kinetics as electric field reversals and the trapping of low-energy electrons in potential wells propagating with striation along the discharge tube. The formation of the low energy peak in the EEDF is similar to that in rf capacitive and inductive discharges at low gas pressures where the low-energy electrons are trapped in the potential well created by the ambipolar electric field and cannot penetrate into the areas of electron heating by strong rf electric fields. Published under license by AIP Publishing.
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页数:5
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