Effect of residual stress on the stability of gold thin film surfaces

被引:3
|
作者
Aguilar, M
Oliva, AI
Quintana, P
机构
[1] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
[2] CINVESTAV, IPN Merida, Dept Fis Aplicada, Yucatan 97310, Mexico
关键词
D O I
10.1080/10426919808935261
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The temporal evolution of the surface topography and x-ray diffractogram of gold thin films was obtained. We found by STM that the surface roughness decreased exponentially with time. X-ray analysis indicates that the microcrystals are strained i.e., the x-ray peaks shift with elapsed time towards the gold standard reflections. The rearrangement of the gold film is induced by surface strains that appear during film growth rather than by the thermal motion of atoms. A DC current was applied to the films to induce surface changes and to study electromigration phenomena. Results show that current effects accelerate film failure by surface diffusion produced by the growth of microcrystals at the expense of mechanically strained microcrystals.
引用
收藏
页码:445 / 453
页数:9
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