High order aberrations calculations of Wien filters using differential algebra methods

被引:4
|
作者
Kang, Yongfeng [1 ]
Hu, Hangfeng [1 ]
Zhao, Jingyi [1 ]
机构
[1] Xi An Jiao Tong Univ, Sch Elect Sci & Engn, Key Lab Phys Elect & Devices, Minist Educ, Xian 710049, Peoples R China
基金
中国国家自然科学基金;
关键词
Wien filters; High order aberration; Differential algebra methods; DESIGN;
D O I
10.1016/j.ultramic.2019.112924
中图分类号
TH742 [显微镜];
学科分类号
摘要
In this paper, a novel scheme based on the differential algebraic (DA) method is proposed to analyze the electron optics properties of the Wien fillers. A new software package is then developed, to compute the geometrical and chromatic aberrations up to the fifth order of the Wien fillers. For examples, the aberrations of single filter and the double filters are calculated. The calculated geometrical aberration coefficients are comparable with the counterpart calculated by Tang's theory. However, both theories can only match with each other in the calculation of the chromatic aberration coefficient when the dispersion ray is taken into consideration in Tang's theory.
引用
收藏
页数:5
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