Interface Engineering-Assisted 3D-Graphene/Germanium Heterojunction for High-Performance Photodetectors

被引:42
|
作者
Zhao, Menghan [1 ]
Xue, Zhongying [2 ]
Zhu, Wei [1 ]
Wang, Gang [1 ]
Tang, Shiwei [1 ]
Liu, Zhiduo [3 ]
Guo, QInglei [4 ,5 ]
Chen, Da [1 ]
Chu, Paul K. [6 ,7 ]
Ding, Guqiao [2 ]
Di, Zengfeng [2 ]
机构
[1] Ningbo Univ, Dept Microelect Sci & Engn, Sch Phys Sci & Technol, Ningbo 315211, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[4] Shandong Univ, Ctr Nanoelect, Jinan 250100, Peoples R China
[5] Shandong Univ, Sch Microelect, Jinan 250100, Peoples R China
[6] City Univ Hong Kong, Dept Phys, Dept Mat Sci & Engn, Kowloon, Hong Kong 999077, Peoples R China
[7] City Univ Hong Kong, Dept Biomed Engn, Kowloon, Hong Kong 999077, Peoples R China
基金
中国国家自然科学基金;
关键词
3D/2D-graphene; germanium; buffer layer; built-in potential; photodetectors; VERTICALLY ORIENTED GRAPHENE; SCHOTTKY JUNCTION; BROAD-BAND; HIGH-RESPONSIVITY; GROWTH-MECHANISM; SILICON; MODULATION; NANOWALLS; SCALE;
D O I
10.1021/acsami.0c02485
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Three-dimensional graphene (3D-Gr) with excel- lent light absorption properties has received enormous interest, but in conventional processes to prepare 3D-Gr, amorphous carbon layers are inevitably introduced as buffer layers that may degrade the performance of graphene-based devices. Herein, 3D-Gr is prepared on germanium (Ge) using two-dimensional graphene (2D-Gr) as the buffer layer. 2D-Gr as the buffer layer facilitates the in situ synthesis of 3D-Gr on Ge by plasma-enhanced chemical vapor deposition (PECVD) by promoting 2D-Gr nucleation and reducing the barrier height. The growth mechanism is investigated and described. The enhanced light absorption as confirmed by theoretical calculation and 3D-Gr/2D-Gr/Ge with a Schottky junction improves the performance of optoelectronic devices without requiring pre- and post-transfer processes. The photodetector constructed with 3D-Gr/2D-Gr/Ge shows an excellent responsivity of 1.7 A W-1 and detectivity 3.42 x 10(14) cm H-1/2 W-1 at a wavelength of 1550 nm. This novel hybrid structure that incorporates 3D- and 2D-Gr into Ge-based integrated circuits and photodetectors delivers excellent performance and has large commercial potential.
引用
收藏
页码:15606 / 15614
页数:9
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