Growth of AlPSb and GaPSb on InP by gas-source molecular beam epitaxy

被引:20
|
作者
Shimomura, H
Anan, T
Sugou, S
机构
[1] Optoelectronic NEC Lab., Real World Computing Partnership, c/o Optoelectronics Res. Labs. NEC, Tsukuba, Ibaraki 305
关键词
D O I
10.1016/0022-0248(95)00950-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have studied the growth conditions of AlPSb and GaPSb lattice match to InP substrates using gas-source molecular beam epitaxy, Mirror-like surface morphology was obtained under the lattice matching growth conditions. It was found that the solid compositions of AlPSb and GaPSb were sensitive to the relative flux ratio of the two group V elements (P,Sb) and to the growth temperature, respectively. The electrical properties of Be-doped and Si-doped GaPSb were characterized by Hall measurements at room temperature. In Si-doped GaPSb, electron concentration seems to saturate at 5 X 10(17) cm(-3). For optical properties, the ellipsometically measured refractive indices at 1.55 mu m were 3.037 for AlPSb and 3.579 for GaPSb showed larger refractive index difference than the InGaAsP (E(g) = 1.45 mu m)/InP system. 20 pairs of AlPSb/GaPSb DBR reflectivity measurements demonstrate a stop-band width of 206 nm with the maximum reflectivity exceeding 99%. This result will promise to be useful for long-wavelength surface emitting lasers.
引用
收藏
页码:121 / 125
页数:5
相关论文
共 50 条
  • [1] HIGH-REFLECTANCE ALPSB/GAPSB DISTRIBUTED-BRAGG-REFLECTOR MIRRORS ON INP GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    SHIMOMURA, H
    ANAN, T
    MORI, K
    SUGOU, S
    [J]. ELECTRONICS LETTERS, 1994, 30 (04) : 314 - 315
  • [2] Growth of TlInGaAs on InP by gas-source molecular beam epitaxy
    Takenaka, K
    Asahi, H
    Koh, H
    Asami, K
    Gonda, S
    Oe, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (2B): : 1026 - 1028
  • [3] GROWTH OF INP, INGAAS, AND INGAASP ON INP BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    ASONEN, H
    RAKENNUS, K
    TAPPURA, K
    HOVINEN, M
    PESSA, M
    [J]. JOURNAL OF CRYSTAL GROWTH, 1990, 105 (1-4) : 101 - 105
  • [4] Effect of noble gas plasmas on the growth of InP by gas-source molecular beam epitaxy
    Thompson, DA
    Mitchell, DB
    Robinson, BJ
    LaPierre, RR
    Mascher, P
    [J]. ION BEAM MODIFICATION OF MATERIALS, 1996, : 769 - 772
  • [5] HOMOEPITAXIAL GROWTH OF INP ON (111)B SUBSTRATES BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    HOU, HQ
    TU, CW
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (03) : 281 - 283
  • [6] Growth optimization of GaAsSb lattice matched to InP by gas-source molecular-beam epitaxy
    Wu, BR
    Xu, CF
    Chang, KL
    Hsieh, KC
    Cheng, KY
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1641 - 1644
  • [7] GAS-SOURCE MOLECULAR-BEAM EPITAXY
    PANISH, MB
    TEMKIN, H
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1989, 19 : 209 - 229
  • [8] Growth kinetics of GaN grown by gas-source molecular beam epitaxy
    Jenny, JR
    Kaspi, R
    Evans, KR
    [J]. JOURNAL OF CRYSTAL GROWTH, 1997, 175 : 89 - 93
  • [9] Growth studies of GaP on Si by gas-source molecular beam epitaxy
    Bi, WG
    Mei, XB
    Tu, CW
    [J]. JOURNAL OF CRYSTAL GROWTH, 1996, 164 (1-4) : 256 - 262
  • [10] IMPROVEMENT OF INP/INGAAS HETEROINTERFACES GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY
    ANAN, T
    SUGOU, S
    NISHI, K
    [J]. APPLIED PHYSICS LETTERS, 1993, 63 (08) : 1047 - 1049