Research Progress of Laser Micro-Nano Connection Technology

Laser micro-nano connection connection technology is the basis for mass production of micro-nano structures and electronic components, and is a key technology in the field of micro-nano manufacturing. Based on a brief introduction to the application requirements and main technical methods of micro-nano connection technology, this paper focuses on the analysis and discussion of the micro-nano-scale laser connection technology. Firstly, the dimension range of laser connection technology is introduced, and then three typical laser micro-nano connection technologies are selected according to the different process characteristics, namely laser micro welding technology, micro-nano-scale laser soldering technology and laser soldering humping technology, the research on the processing principles and characteristics, process parameters and application status of the three technology are reviewed , respectively. Through the summary of the research and application status of laser micro-nano connection technology, this paper discusses the important role of laser micro-nano connection technology in the field of aerospace, microelectronic packaging, medical device, etc. , and summarizes the development direction and future research work of laser micro nano connection technology.