Effect of Substrate Temperature on the Structure and Magnetic Properties of CoPt/AlN Multilayer Films

被引：3
|
作者：
An, Hongyu [1 ]
Harumoto, Takashi [1 ]
Sannomiya, Takumi [1 ]
Muraishi, Shinji [1 ]
Tu Rong [2 ]
Zhang Lianmeng [2 ]
Nakamura, Yoshio [1 ]
Shi, Ji [1 ]
机构：
[1] Tokyo Inst Technol, Dept Met & Ceram Sci, Meguro Ku, 2-12-1 Ookayama, Tokyo 1528552, Japan
[2] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
来源：
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION | 2016年 / 31卷 / 01期
关键词：
CoPt/AlN; post-annealing; crystallinity; magnetic anisotropy; ANISOTROPY;
D O I：
10.1007/s11595-016-1327-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films has been investigated. The crystallinity of CoPt has been improved with increasing substrate temperature from room temperature to 400 degrees C. After post-annealing process, L1(0) CoPt structure transformation has also been promoted. However, since the easy magnetic axis of L1(0) CoPt is in [001] orientation, the promotion of L1(0) CoPt transformation causes the change of easy magnetic axis in (111) textured CoPt layers, which impairs the perpendicular magnetic anisotropy. The optimum substrate temperature should be room temperature to obtain the strongest perpendicular magnetic anisotropy according to the results of the present work.
引用
收藏
页码：44 / 47
页数：4
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