CVD diamond with boron-doped delta-layers deposited by microwave plasma

被引:0
|
作者
Vikharev, A. L. [1 ]
Gorbachev, A. M. [1 ]
Lobaev, M. A. [1 ]
Radishev, D. B. [1 ]
Isaev, V. A. [1 ]
Bogdanov, S. A. [1 ]
Drozdov, M. N. [2 ]
Demidov, E. V. [2 ]
Surovegina, E. A. [2 ]
Shashkin, V. I. [2 ]
Yunin, P. A. [2 ]
Butler, J. E. [1 ]
机构
[1] Russian Acad Sci, Inst Appl Phys, Nizhnii Novgorod, Russia
[2] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod, Russia
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D O I
10.1051/epjconf/201714901010
中图分类号
O59 [应用物理学];
学科分类号
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页数:2
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