Properties of bulk AlN grown by thermodecomposition of AlCl3•NH3

被引:22
|
作者
Freitas, JA [1 ]
Braga, GCB
Silveira, E
Tischler, JG
Fatemi, M
机构
[1] USN, Res Lab, ESTD, Washington, DC 20375 USA
[2] Univ Brasilia, Inst Fis, BR-70000 Brasilia, DF, Brazil
[3] Univ Fed Parana, Dept Fis, BR-81531990 Curitiba, Parana, Brazil
关键词
D O I
10.1063/1.1614418
中图分类号
O59 [应用物理学];
学科分类号
摘要
Self-nucleated bulk AlN crystals were grown by thermodecomposition of AlCl3.NH3 vaporized in the low-temperature zone of a two-zone furnace. X-ray diffraction of the AlN crystals show single lines with a small linewidth indicating high single-crystalline quality. Polarized Raman scattering experiments of these samples confirm the x-ray results based on the detection of a small linewidth for all allowed optical phonons. Low-temperature cathodoluminescence spectra show very sharp emission bands close to the optical band gap, which have been assigned to free-excitons A and B, and exciton-bound to shallow neutral impurity. The latter has a full width at half maximum smaller than 1.0 meV. (C) 2003 American Institute of Physics.
引用
收藏
页码:2584 / 2586
页数:3
相关论文
共 50 条
  • [1] Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
    Rontu, Ville
    Sippola, Perttu
    Broas, Mikael
    Ross, Glenn
    Sajavaara, Timo
    Lipsanen, Harri
    Paulasto-Krockel, Mervi
    Franssila, Sami
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (02):
  • [3] SYNTHESIS OF FINE ALN POWDER BY VAPOR-PHASE REACTION OF ALCL3 AND NH3
    KIMURA, I
    HOTTA, N
    NUKUI, H
    SAITO, N
    YASUKAWA, S
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1988, 96 (02): : 206 - 210
  • [4] Quantum chemistry calculation of initial stage of AlCl3 + NH3 reaction
    Wang, Jun
    Chen, Changqi
    Zhu, Wu
    Chen, Ming
    Liu, Zhen
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2005, 25 (SUPPL.): : 9 - 11
  • [5] SYNTHESIS OF FINE AlN POWDER BY VAPOR PHASE REACTION OF AlCl3 AND NH3.
    Kimura, Isao
    Hotta, Noriyasu
    Nukui, Hideki
    Saito, Natsukaze
    Yasukawa, Saburo
    Yogyo Kyokai Shi/Journal of the Ceramic Society of Japan, 1988, 96 (02): : 206 - 210
  • [6] Thermodynamics on hydride vapor phase epitaxy of AIN using AlCl3 and NH3
    Kumagai, Y.
    Takemoto, K.
    Kikuchi, J.
    Hasegawa, T.
    Murakami, H.
    Koukitu, A.
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2006, 243 (07): : 1431 - 1435
  • [7] Batch processing of aluminum nitride by atomic layer deposition from AlCl3 and NH3
    Chen, Zhenzi
    Zhu, Zhen
    Harkonen, Kari
    Salmi, Emma
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (02):
  • [8] PREFERRED ORIENTATION OF AIN PLATES PREPARED BY CHEMICAL VAPOR-DEPOSITION OF ALCL3 + NH3 SYSTEM
    GOTO, T
    TSUNEYOSHI, J
    KAYA, K
    HIRAI, T
    JOURNAL OF MATERIALS SCIENCE, 1992, 27 (01) : 247 - 254
  • [9] Synthesis of an AlN Polycrystalline Bulk Layer and Nanotubes by Using NH3 and Bi
    Morito, Haruhiko
    Ide, Tomoyuki
    Karahashi, Taiki
    Orikasa, Hironori
    Yamada, Takahiro
    Yamane, Hisanori
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2009, 92 (11) : 2578 - 2582
  • [10] Structure AlCl3
    Laschkarew, WE
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1930, 193 (03): : 270 - 276