Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator

被引：5

作者：

Kruchinin, D. Yu. ^{[1
]}

Yakovlev, O. B. ^{[1
]}

机构：

[1] ES Yalamov Ural Optomech Factory Mfg Assoc, Ekaterinburg, Russia

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 2011年 / 78卷 / 06期

关键词：

PHOTOLITHOGRAPHY;

D O I：

10.1364/JOT.78.000383

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

下载

页码：383 / 385

页数：3

共 7 条

[1] Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors
Kruchinin, D. U.
Yakovlev, O. B.
Andronov, M. P.
JOURNAL OF OPTICAL TECHNOLOGY, 2012, 79 (07) : 412 - 414
[2] Testing of Long-Term Stability of Metrological Characteristics of the CLWS-300 Laser Image Generator
V. P. Kiryanov
A. G. Karakotskii
A. V. Kiryanov
Optoelectronics, Instrumentation and Data Processing, 2023, 59 : 620 - 626
[3] Testing of Long-Term Stability of Metrological Characteristics of the CLWS-300 Laser Image Generator
Kiryanov, V. P.
Karakotskii, A. G.
Kiryanov, A. V.
OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING, 2023, 59 (05) : 620 - 626
[4] Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography
Kruchinin, D. Yu.
JOURNAL OF OPTICAL TECHNOLOGY, 2013, 80 (08) : 499 - 501
[5] How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced
Kruchinin, D. Yu.
Farafontova, E. P.
JOURNAL OF OPTICAL TECHNOLOGY, 2015, 82 (06) : 385 - 387
[6] TESTING OF CIRCULAR OPTICAL SCALES, LIMBS AND CODE WHEELS BY MEANS OF A RING LASER
BORISYUK, LV
SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1989, 56 (05): : 310 - 313
[7] STUDY OF ANGULAR STRUCTURE OF SECOND OPTICAL HARMONIC .2. LASER BEAM FOCUSING BY MEANS OF CYLINDRICAL LENSES
KOVRIGIN, AI
PODSOTSK.NK
SUKHORUK.AP
OPTICS AND SPECTROSCOPY-USSR, 1969, 26 (03): : 215 - &

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