Focusing optics system for the Time-resolved Molecular Optics (TMO) beam line at LCLS Surface metrology and mirror shape control of bendable mirror system

被引：0

作者：

Lee, Lance ^{[1
]}

Cocco, Daniele ^{[1
]}

Ng, May Ling ^{[1
]}

Zhang, Lin ^{[1
]}

Morton, Daniel ^{[1
]}

机构：

[1] SLAC Natl Accelerator Lab, 2575 Sand Hill Rd, Menlo Pk, CA 94025 USA

来源：

ADAPTIVE X-RAY OPTICS V | 2018年 / 10761卷

关键词：

Free-electron laser; Kirkpatrick-Baez; X-ray optics; active optics; bendable mirror;

D O I：

10.1117/12.2323252

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Nine bendable mirrors will be installed as part of the upgrade to Linac Coherent Light Source. To achieve the target performance, accurate elliptical shapes must be generated with these focusing mirrors to an accuracy in the order of 10(4) to 10(5). We briefly summarize the developmental work including surface metrology via stitching and actuator characterization as well as fitting algorithm to achieve shape control of a KB developmental prototype. The height error of the centerline shape generated by the current system is in the order of 3 nm for a one meter long silicon mirror. The most important limiting factor is metrology due to environmental control.

引用

页数：9

共 3 条

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Dost, S
1997 IEEE PACIFIC RIM CONFERENCE ON COMMUNICATIONS, COMPUTERS AND SIGNAL PROCESSING, VOLS 1 AND 2: PACRIM 10 YEARS - 1987-1997, 1997, : 581 - 584
[2] Linear quadratic Gaussian control of a deformable mirror adaptive optics system with time-delayed measurements
Paschall, Randall N., 1600, Optical Soc of America, Washington, DC, United States (32):
[3] LINEAR-QUADRATIC GAUSSIAN CONTROL OF A DEFORMABLE MIRROR ADAPTIVE OPTICS SYSTEM WITH TIME-DELAYED MEASUREMENTS
PASCHALL, RN
ANDERSON, DJ
APPLIED OPTICS, 1993, 32 (31): : 6347 - 6358

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