A three-dimensional waveguide substrate for DNA-microarrays based on macroporous silicon

In this paper we present a three-dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of discrete microchannels running perpendicular through the substrate, Partial oxidation generates compartments with channel walls that are completely converted into SiO2 but leaves a rectangular grid of silicon walls separating the SiO2 compartments. We demonstrate that the SiO2 walls act as optical waveguides and the opaque silicon walls divide the substrate into optically isolated compartments. In DNA microarray experiments, we show that the silicon walls of the compartments prevent cross talk between adjacent DNA spots. The structure is compatible with all conventional read-out techniques such as fluorescence, chemiluminescence, and precipitation staining. (c) 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.