NANOFABRICATION OF CHALCOGENIDE GLASS FOR INFRARED SENSORS

被引：0
|
作者：
Wei, Le [1 ]
Dong, Liang [1 ]
Lu, Meng [1 ]
机构：
[1] Iowa State Univ, Iowa City, IA 50011 USA
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
美国国家科学基金会;
关键词：
Chalcogenide; Imprint lithography; Nanophotonics; Silver doping; SILVER; PHOTODISSOLUTION;
D O I：
10.1109/transducers.2019.8808451
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a novel nanofabrication approach that combines imprint and silver doping lithography (iSDL) to generate nanoscale patterns in chalcogenide (ChG) thin films, The iSDL approach is capable of controlling the photodoping of silver in amorphous ChG with a high spatial precision. The ChG nanophotonic devices with one-dimensional (ID) and two-dimensional (2D) periodic structures were fabricated and characterized.
引用
收藏
页码：1647 / 1650
页数：4
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