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Mechanical properties of thin films: Problems and testing techniques.

被引：8
|
作者：
Felder, E
Angelelis, C
Ducarroir, M
Ignat, M
Mazot, P
机构：
[1] Ecole Mines, CEMEF, UMR 7635 CNRS, F-06904 Sophia Antipolis, France
[2] Universite Perpignan, IMP, UPR 8521 CNRS, F-66860 Perpignan, France
[3] Ecole Natl Super Electrochim & Electrome Grenoble, Thermodynam & Physicochim Met Lab, URA 29 CNRS, F-38402 St Martin Dheres, France
[4] ENSMA, LMPM, URA 863 CNRS, Site Futuroscope, F-86960 Futuroscope, France
来源：
ANNALES DE CHIMIE-SCIENCE DES MATERIAUX | 1998年 / 23卷 / 5-6期
关键词：
D O I：
10.1016/S0151-9107(99)80023-3
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The aim of this work is the characterization of the mechanical behaviour of a couple consisting of a substrate and of a ceramic coating with a few micrometer thickness. We review here the related quantities and the measurement methods with particular emphasis on the significant factors which influence these quantities. With the choosen testing techniques we discuss the various approaches and the constitutive equations of multilayer systems. Specific papers will describe in more details the results related to coatings composed of carbides or nitrides manufactured by dry routes.
引用
收藏
页码：791 / 819
页数：29
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