Physical Analysis of a Biomimetic Microphone With a Central-Supported (C-S) Circular Diaphragm for Sound Source Localization

被引：20

作者：

Chen, Chien-Chang ^{[1
,2
]}

Cheng, Yu-Ting ^{[1
,2
]}

机构：

[1] Natl Chiao Tung Univ, Dept Elect Engn, Microsyst Integrat Lab, Hsinchu 300, Taiwan

[2] Natl Chiao Tung Univ, Inst Elect, Hsinchu 300, Taiwan

来源：

IEEE SENSORS JOURNAL | 2012年 / 12卷 / 05期

关键词：

Biomimetic microphone; central floating joint; central-supported diaphragm; clover; hybrid; MEMS microphone; parasitoid fly; quality factor; sound source localization; squeeze film air damping effect; PARASITOID FLY; DIRECTIONAL HEARING; EARS;

D O I：

10.1109/JSEN.2011.2173931

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a physical analysis of the biomimetic microphone designed with a central-supported (C-S) diaphragm for the sound source localization. A clover-stem-like C-S design is proposed and achieving 47% improvement of net diaphragm displacement in comparison with the conventional C-S diaphragm design. The new design can effectively not only compensate undesired deformation of sensing diaphragm due to gravity and residual stresses but also make the diaphragm more flexible for better sound pressure sensitivity.

引用

页码：1504 / 1512

页数：9

共 3 条

[1] Squeeze film damping analysis, of biomimetic micromachined microphone for sound source localization
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SENSORS AND ACTUATORS A-PHYSICAL, 2016, 250 : 60 - 70
[2] Sound source localization using multiple circular microphone arrays based on harmonic analysis
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Han, Zerui
Yang, Jun
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2021, 149 (05): : 3517 - 3523
[3] Design and experiments of bio-mimicry sound source localization sensor with gimbal-supported circular diaphragm
Ono, N
Saito, A
Ando, S
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 935 - 938

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