Method of monitoring the shape of an atomic force (tunneling) microscope tip using backscattering spectrometry

被引：1
|
作者：
Dedkov, GV [1 ]
Rekhviashvili, SS [1 ]
机构：
[1] Kabardino Balkar State Univ, Nalchik, Russia
来源：
TECHNICAL PHYSICS LETTERS | 1997年 / 23卷 / 06期
关键词：
Atomic Force Microscope; Measured Dependence; Incident Beam; Shape Monitoring;
D O I：
10.1134/1.1261711
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method is proposed to monitor the shape of an atomic force microscope tip, which can combine the operations of ion etching and shape monitoring, by using the intensity of the backscattering of ions from the same or a different beam to monitor the shape. Relationships have been obtained to monitor the shape of the probe using the measured dependence of the backscattering intensity on the parameters of the incident beam. (C) 1997 American Institute of Physics. [S1063-7850(97)01606-6].
引用
收藏
页码：452 / 453
页数：2
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