Photomolding in microsystem technology.

被引：0

作者：

Hanemann, T ^{[1
]}

Ruprecht, R ^{[1
]}

Hausselt, JH ^{[1
]}

机构：

[1] Forschungszentrum Karlsruhe, Inst Mat Forsch 3, D-76021 Karlsruhe, Germany

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1998年 / 216卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

320-POLY

引用

页码：U95 / U95

页数：1

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