Miniature 10 kHz thermo-optic delay line in silicon

被引:17
|
作者
Margallo-Balbas, Eduardo [1 ]
Geljon, Max [2 ]
Pandraud, Gregory [3 ]
French, Patrick J. [2 ]
机构
[1] Medlumics SL, Madrid 28008, Spain
[2] Delft Univ Technol, Elect Instrumentat Lab, NL-2628 CD Delft, Netherlands
[3] Delft Univ Technol, Dept Elect Components Technol & Mat, NL-2628 CD Delft, Netherlands
关键词
DISPERSION;
D O I
10.1364/OL.35.004027
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The scanning delay line is a key component of time-domain optical coherence tomography systems. It has evolved since its inception toward higher scan rates and simpler implementation. However, existing approaches still suffer from drawbacks in terms of size, cost, and complexity, and they are not suitable for implementation using integrated optics. In this Letter, we report a rapid scanning delay line based on the thermo-optic effect of silicon at. lambda = 3 mu m manufactured around a generic planar lightwave circuit technology. The reported device attained line scan rates of 10 kHz and demonstrated a scan range of 0.95 mm without suffering any observable loss of resolution (15 mu m FWHM) owing to depth-dependent chromatic dispersion. (C) 2010 Optical Society of America
引用
收藏
页码:4027 / 4029
页数:3
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