Broadband near-infrared reflector based on double-layer subwavelength gratings

被引：0
|
作者：
Wang, Qi [1 ,2 ]
Li, Rui [1 ,2 ]
Gao, Xufeng [1 ,2 ]
Cao, Shuhua [1 ,2 ]
Tao, Chunxian [1 ,2 ]
Hong, Ruijin [1 ,2 ]
Zhang, Dawei [1 ,2 ]
机构：
[1] Univ Shanghai Sci & Technol, Shanghai Key Lab Modern Opt Syst, Engn Res Ctr Optic Instrument & Syst, Sch Opt Elect & Comp Engn,Minist Educ, 516 Jungong Rd, Shanghai 200093, Peoples R China
[2] Univ Shanghai Sci & Technol, Shanghai Key Lab Modern Opt Syst, 516 Jungong Rd, Shanghai 200093, Peoples R China
来源：
OPTICAL AND QUANTUM ELECTRONICS | 2021年 / 53卷 / 09期
基金：
中国国家自然科学基金;
关键词：
Broadband reflector; Guided mode resonance; Double-layer grating; GUIDED-MODE RESONANCE; FABRICATION; PROFILE; FILTERS;
D O I：
10.1007/s11082-021-03158-6
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A broadband reflector with a reflectance up to 97.8% over a 144 nm spectral range from 1476 to 1620 nm is proposed by comprising double-layer subwavelength gratings with one grating layer embedded in SiO2 layer. An analysis of the resonance leaky modes with overlapping gratings shows the physical mechanism of the wide broad high-reflectivity band. The tolerance of structural parameter is analyzed and the variation of bandwidth is explained by combining the behaviors of the two guided mode resonances. The guided mode resonance and high refractive index contrast properties lead to a good angular tolerance that exhibited an angular insensitivity (similar to 11 degrees) at 1550 nm. Overall, the broadband reflector may benefit the monolithic integration of optoelectronic devices.
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收藏
页数：8
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